APA (7th ed.) Citation

(2001). Gate stack and silicide issues in silicon processing: Symposium held April 25-27, 2000, San Francisco, California, U.S.A. / editors L.A. Clevenger ... [and others].

Chicago Style (17th ed.) Citation

Gate Stack and Silicide Issues in Silicon Processing: Symposium Held April 25-27, 2000, San Francisco, California, U.S.A. / Editors L.A. Clevenger ... [and Others]. 2001.

MLA (9th ed.) Citation

Gate Stack and Silicide Issues in Silicon Processing: Symposium Held April 25-27, 2000, San Francisco, California, U.S.A. / Editors L.A. Clevenger ... [and Others]. 2001.

Warning: These citations may not always be 100% accurate.