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| Format: | Book |
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| Language: | English |
| Subjects: | |
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| era | |
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| format | Book |
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| id | 44521e51-4c8f-4e5c-a9f5-e3fde8faaa8f |
| isbn | 1558995196 |
| issn | |
| language | eng |
| physical | 1 volume (various pagings) :illustrations ;24 cm. |
| publication | – publisher: Materials Research Society dateOfPublication: 2001 |
| publishDate | 2001 |
| subjects | |
| title | Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A. / editors L.A. Clevenger ... [and others]. |
| topic | Integrated circuits Silicides. Gate array circuits. Electric leakage. Conference papers and proceedings. |