Bargiidšearbma: Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A. / editors L.A. Clevenger ... [and others].

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Furkejuvvon:

Bibliográfalaš dieđut
Materiálatiipa:	Girji
Giella:	eaŋgalasgiella
Fáttát:	Integrated circuits Silicides. Gate array circuits. Electric leakage. Conference papers and proceedings.
Fáddágilkorat:	Lasit fáddágilkoriid Eai fáddágilkorat, Lasit vuosttaš fáddágilkora!

era
format	Book
genre
geographic
id	44521e51-4c8f-4e5c-a9f5-e3fde8faaa8f
isbn	1558995196
issn
language	eng
physical	1 volume (various pagings) :illustrations ;24 cm.
publication	– publisher: Materials Research Society dateOfPublication: 2001
publishDate	2001
subjects
title	Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A. / editors L.A. Clevenger ... [and others].
topic	Integrated circuits Silicides. Gate array circuits. Electric leakage. Conference papers and proceedings.