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| Формат: | Книга |
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| Мова: | Англійська |
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| era | |
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| format | Book |
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| geographic | |
| id | 99945f31-b212-443f-a651-074e860bf8d1 |
| isbn | 1558996060 |
| issn | |
| language | eng |
| physical | 1 volume (various pagings) :illustrations ;24 cm. |
| publication | – publisher: Materials Research Society dateOfPublication: 2002 |
| publishDate | 2002 |
| subjects | |
| title | Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, S.A. Campbell ... [and others]. |
| topic | Integrated circuits Silicides. Gate array circuits. Electric leakage. Conference papers and proceedings. |