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| Format: | Book |
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| Language: | English |
| Subjects: | |
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| format | Book |
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| id | b4a9284c-3e44-45f3-935e-e2a0b6c6a714 |
| isbn | 1566773954 |
| issn | |
| language | eng |
| physical | xvii, 304 pages :illustrations ;23 cm. |
| publication | – publisher: Electrochemical Society dateOfPublication: 2003 |
| publishDate | 2003 |
| subjects | |
| title | Physics and technology of high-k gate dielectrics I : proceedings of the International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues : held in Salt Lake City, Utah, October 20-24, 2002 / editors, S. Kar ... [and others] ; sponsoring divisions: Dielectric Science and Technology, and Electronics. |
| topic | Gate array circuits. Dielectrics. Conference papers and proceedings. |