APA (7th ed.) Citation

(2005). Advanced gate stack, source/drain and channel engineering for Si-based CMOS: New materials, processes, and equipment : proceedings of the international symposium / editors, Evgeni P. Gusev ... [and others].

Chicago Style (17th ed.) Citation

Advanced Gate Stack, Source/drain and Channel Engineering for Si-based CMOS: New Materials, Processes, and Equipment : Proceedings of the International Symposium / Editors, Evgeni P. Gusev ... [and Others]. 2005.

MLA (9th ed.) Citation

Advanced Gate Stack, Source/drain and Channel Engineering for Si-based CMOS: New Materials, Processes, and Equipment : Proceedings of the International Symposium / Editors, Evgeni P. Gusev ... [and Others]. 2005.