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| Format: | Book |
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| Language: | English |
| Subjects: | |
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| era | |
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| format | Book |
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| id | c71a1dca-d9f5-46b5-a205-8fa7cdfaed79 |
| isbn | 1566774632 |
| issn | |
| language | eng |
| physical | xv, 634 pages :illustrations ;24 cm. |
| publication | – publisher: Electrochemical Society dateOfPublication: 2005 |
| publishDate | 2005 |
| subjects | |
| title | Advanced gate stack, source/drain and channel engineering for Si-based CMOS : new materials, processes, and equipment : proceedings of the international symposium / editors, Evgeni P. Gusev ... [and others] |
| topic | Metal oxide semiconductors, Complementary. Metal oxide semiconductors Gate array circuits Conference papers and proceedings. |